WoS SCIE Q1Scopus Q3SCImago #15,345Subscription

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Q: What is the Impact Factor of Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics?

The journal Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics is indexed in Web of Science (SCIE, quartile Q1) with official metrics continually updated on ImpaQ.

Q: Is Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics indexed in Web of Science or Scopus?

Yes, Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics is indexed in Web of Science (SCIE, Q1 quartile). Furthermore, in Scopus (SCImago), it holds an SJR rating of 0.359 (Q3) and an H-index of 131.

Identifier (ISSN):2166-2746(Print)/2166-2754(Online)

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Publisher:AVS Science and Technology Society

Clarivate JCR Index Advisory: Not Indexed in Latest JCR

Official Website Submission Portal Compare

Clarivate Impact Factor (IF 2024)

N/A

Journal Impact Factor

IF Trend↓

WoS Quartile

WoS SCIEJCR Quartile

Clarivate WoS JCR

WoS Categories↓

Impact Factor Trend (2023–2024)

Clarivate IF trend for Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

WoS Q1

Annual Impact Factor Metric

Current (2024):1.5

Scopus SJR & RankScopus Q3

0.359

#15,345

SCImago Journal Rank citation prestige weighting

Scopus Year: 2025

H-Index (2025)

131

131 papers with at least that number of citations each

WoS: SCIE / JCRQ1

Self-Citation RateN/A

Safe Level (< 15%)Warning Level (> 20%)

Self-citation below 15% indicates strong scholarly independence.

Volume & Open AccessSubscription

117articles/year

0% Gold OA•0% Original Research

Aims & Scope

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics (ISSN: 2166-2746) is a peer-reviewed international scholarly journal in the field of Materials Science, published by AVS Science and Technology Society. The periodical holds tracked under Web of Science (SCIE) in quartile Q1, a Scopus SJR indicator of 0.359 (Q3), an H-index of 131.

Topics Covered (Recognized by AI)

Physics98.7%Materials science98.6%Quantum mechanics91.6%Chemistry88.1%Organic chemistry81.7%Nanotechnology79.4%Engineering79.1%Optoelectronics78.4%Composite material74.2%Optics57.7%Electrical engineering48.3%Layer (electronics)48.2%Metallurgy45.2%Biology33.8%Chemical engineering32.2%Computer science31.6%Nuclear physics29.7%Thermodynamics28.5%Medicine27.2%Condensed matter physics26.9%Pathology24.4%Chromatography24.3%Geology23.4%Physical chemistry23.3%Environmental chemistry22.6%Analytical Chemistry (journal)22.6%Alternative medicine21.6%Fabrication21.5%Mathematics21.4%

Primary Research Areas

Materials Science Materials Chemistry

Official Website NLM PubMed Catalog SCImago Profile

0 calls

Special Issues

Calls for Papers

No active Calls for Papers found for this journal.

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WoS Categories & Quartiles

Detailed JCR / JCI category rankings and quartile breakdown from Clarivate

Clarivate JCR

No WoS category details available for this journal.

Annual Historical Statistics & Publications

Track annual publication volume, total citations, and Impact Factor evolution

12 year

2026Latest

IF—

Articles / Year117

Total Citations25

2025

IF—

Articles / Year182

Total Citations237

2024

IF1.5

Articles / Year187

Total Citations777

2023

IF0

Articles / Year190

Total Citations745

2022

IF—

Articles / Year161

Total Citations902

Year	Impact Factor	Articles / Year	Total Citations
2026	—	117	25
2025	—	182	237
2024	1.5	187	777
2023	0	190	745
2022	—	161	902
2021	—	157	987
2020	—	217	1,705
2019	—	253	2,576
2018	—	231	2,240
2017	—	260	3,009
2016	—	308	3,717
2015	—	274	2,815

SCImago & Scopus Journal Intelligence

Global SCImago ranking, SJR prestige index, Scopus coverage, and societal policy impact

Rank #15,345Scopus Q3SCImago Profile

Scopus Coverage:1991-1992, 2009-2026

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Scopus Broad Areas:Chemical EngineeringEngineeringMaterials SciencePhysics and Astronomy

Scopus Citation Rank (SJR)Q3

0.359

Weighted prestige citation metric per document indexed in the Scopus database.

Quartile: Scopus Q3

Citations / Doc (2 years)

1.55

Average citations received per document published in the 2-year window.

2-Year Citation Window

Estimated Publication Fee (APC)

$2,754 USD

Estimated Article Processing Charge for Open Access publication.

Estimated cost / article

Scopus 3-Year Publication & Citation Window

3-Year Citations829

3-Year Documents547

Citable Documents543

Aggregated from Scopus database across the 3-year SJR evaluation window.

Societal Impact & Inclusivity (SCImago)

Policy Citations (Overton)0

Citations in government and international policy documents

Female Author Rate23.6%

Percentage of female authors published in the journal

Real-world societal policy reach and author gender diversity tracked by SCImago.

Scopus Subject Categories

Condensed Matter PhysicsQ3

Electrical and Electronic EngineeringQ3

Electronic, Optical and Magnetic MaterialsQ3

InstrumentationQ3

Materials ChemistryQ3

Process Chemistry and TechnologyQ3

Surfaces, Coatings and FilmsQ3

Academic Metric Intelligence

Journal Metrics & Citation Visualizations

Total Cites vs Self-Cites

Evaluation of scholarly independence and citation reach

Total citations steady growth

Self-citation: N/A

Citations per Document

Citation metric windows across 2, 3, and 4 years

Cites / Doc (4 years)Cites / Doc (3 years)Cites / Doc (2 years)

Chinese Academy of Sciences (CAS) Classification

Major / minor zone classification and CAS Early Warning List history

Major Category (Broad Field):

4区 (Zone 4)Engineering & Technology

Minor Category (Specific Field):

4区ENGINEERING, ELECTRICAL & ELECTRONIC

CAS Early Warning List History:

Updated annually: 2020 – 2024

2020

Not warned

2021

Not warned

2022

Not warned

2023

Not warned

2024

Not warned

Academic Intelligence Overview & Context

ImpaQ Analysis

The journal enforces rigorous peer evaluation with an annual output of approximately 117 scientific articles. In terms of accessibility and author fees, it operates under the Subscription model with an estimated APC of $2,754 USD. It serves as a benchmark publication platform for academics, researchers, and doctoral candidates seeking global research visibility.